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FOUP Pod Opener

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>> Semiconductors

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>> FOUP Pod Opener

      

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Solution: 300mm FOUP Pod Door Opener
  • Modular design with kinematic couplings, port plates, and communication interfaces.
  • Z-mechanism moves door plate system up and in to seal with the port bezel. Axis is servo driven.
Problem
  • Design a Pod Door Opener to accept 300mm 13 or 25 wafer FOUP's (Front Opening Unified Pod - SEMI E-62).
  • The Pod Door Opener should be used either as a stand alone load port or part of a process tool buffer.

  • Meet all SEMI standards for clean room and load port guidelines including the 900mm ergonomic load height and carrier knematic coupling standards.