Thinking Machines That Work!

GoFastRobots

Research in Robotics, Recognition and Reasoning.
   
     

 2001-2007 GoFastRobots, LLC. All Rights Reserved.

SMIF Pod Animation

[--] Case Studies:

        

Military

        

Automotive

        

Plastics

        

Nonwoven Textiles

        

>> Semiconductors

>> Lithography-SMIF

>> SMIF Pod Animation

    

Footwear & Apparel

FOUP Pod Opener

RMS View 1

    

Aerospace

  

RMS VIew 2

    

Machine Tools

  

Vision Target

    

Food & Drugs

  

RMS Slide Show

    

Robotics

        

[+] Proposals

        

[+] Engineering

        
Features
  • Simulated animation demonstrates how an Asyst pod opener lowers the base of a bottom-opening SMIF pod (single-shelf or 6-shelf pod).
  • The Robot accesses each pod shelf with a custom reticle gripper.
  • A machine vision system and a dedicated mechanical alignment device is used to insure orientation prior to returning the reticle to its shelf.
SMIF Pod Animation

Reprinted with permission from ASML US, Inc. All Rights Reserved.