Thinking Machines That Work!

GoFastRobots

Research in Robotics, Recognition and Reasoning.

   
     

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RMS Animation

[--] Case Studies:

       

Military

       

Automotive

       

Plastics

       

Nonwoven Textiles

       

>> Semiconductors

>> Lithography-SMIF

SMIF Pod Animation

   

Footwear & Apparel

FOUP Pod Opener

RMS View 1

   

Aerospace

 

RMS VIew 2

   

Machine Tools

 

Vision Target

   

Food & Drugs

 

>> RMS Slide Show

SEMATECH Review

 PowerPoint Slide Show

Robotics

   

New Litho Roadmap

 PowerPoint Slide Show

[+] Proposals

   

Progress Report

 PowerPoint Slide Show

[+] Engineering

   

MIT White Paper

 Word Doct (PDF 59KB)
Picture of the 157 nm litho-cell at IMEC, consisting of the ASML Micrascan VII and TEL Clean Track ACT8.

RMS Slide Show

Reprinted with permission from ASML US, Inc. All Rights Reserved.

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