A quick
cycle exchange of two or more reticles is possible between the
robot, the stage, and the mechanism due to the flexibility of the
design.
Reticles can
be stored or removed from the library during lithography.
Initial
performance by the 6DOF robot (repeatability rated at ±.02mm /
.0008" at the default tool point near the wrist) is ±.05mm / .002" at
the reticle center (10" offset from tool point). Using position feedback from the integrated
machine vision system enhances the robot's ability to locate
reticles on the stage to ±.0004" (10µ) and ±400µrad.
RMS
System
Reprinted with permission
from ASML US, Inc. All Rights Reserved.
