- The RMS System consists of:
- a Robot
module which supports the robot mounting, a third pod opener,
and a kinematic locking mechanism
- a Tower
frame which houses two pod openers and the robot controller,
isolating these electronics from the inside of the lithography
tool
- a Mechanism
for unloading reticles from the stage and which integrates with the
robot end-effecter
- a Table
support that isolates the RMS system from contacting the lithography
tool components (stages, optics, frame, etc.)
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