Thinking Machines That Work!

GoFastRobots

Research in Robotics, Recognition and Reasoning.
   
     

 2001-2007 GoFastRobots, LLC. All Rights Reserved.

Vision Target

[--] Case Studies:

        

Military

        

Automotive

        

Plastics

        

Nonwoven Textiles

        

>> Semiconductors

>> Lithography-SMIF

SMIF Pod Animation

    

Footwear & Apparel

FOUP Pod Opener

RMS View 1

    

Aerospace

  

RMS VIew 2

    

Machine Tools

  

>> Vision Target

    

Food & Drugs

  

RMS Slide Show

    

Robotics

        

[+] Proposals

        

[+] Engineering

        
Problem
  • Recognize the twin-crosshair etched-chrome targets that establish each reticle's pattern relative to the robot:
    • Seclect vision components including camera, lens, setup procedure for robot calibration
    • Develop lighting scheme to illuminate the target
    • Calculate the crosshair center to sub micron accuracy and repeatability
    • Define communication between vision and robot
Solution

  • Transfer Mechanism with integrated machine vision components:

    • Quad LED stereo spotlight configuration  recreates a backlit target while negating all shadow effects.

    • Integrated XYTz micro positioning stage allows for optical alignment setup in the field.

    • Dual cameras with tube lens achieve high magnification.

Reprinted with permission from ASML US, Inc. All Rights Reserved.